TY  - JOUR
AU  - R Farrow
AU  - Michael Postek
AU  - William Keery
AU  - Samuel Jones
AU  - J Lowney
AU  - M Blakey
AU  - L Fetter
AU  - J Griffith
AU  - J Liddle
AU  - L Hopkins
AU  - H Huggins
AU  - M Peabody
AU  - A Novembre
C2  - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
DA  - 1997-11-01
LA  - en
M1  - 15(6)
PB  - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PY  - 1997
TI  - Application of Transmission Electron Detection to SCALPEL Mask Metrology
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=820894
ER  -