TY  - CONF
AU  - Cedric Powell
AU  - Aleksander Jablonski
C2  - Characterization and Metrology for ULSI Technology 2000, International Conference  | | Characterization and Metrology for ULSI Technology |AIP
DA  - 2001-02-01
LA  - en
M1  - 550
PB  - Characterization and Metrology for ULSI Technology 2000, International Conference  | | Characterization and Metrology for ULSI Technology |AIP
PY  - 2001
TI  - Measurement of Silicon Dioxide Film Thicknesses by X-ray Photoelectron Spectroscopy
ER  -