TY  - CONF
AU  - Kenneth Kreider
AU  - D DeWitt
AU  - Christopher Meyer
AU  - Vincent Scheuerman
C2  - 8th International Symposium on Advanced Thermal Processing of Semiconductors
DA  - 2000-04-01
LA  - en
PB  - 8th International Symposium on Advanced Thermal Processing of Semiconductors
PY  - 2000
TI  - Calibration of Lightpipe Radiation Thermometers in a RTP Tool at 1000 C
ER  -