TY  - CONF
AU  - James Maslar
AU  - R Davis
AU  - Elizabeth Moore
AU  - Donald Burgess
AU  - D Kremer
AU  - S Ehrman
C2  - Electrochemical Society, Meeting | 199th | | Electrochemical Society
DA  - 2001-03-01
LA  - en
M1  - 2001-1
PB  - Electrochemical Society, Meeting | 199th | | Electrochemical Society
PY  - 2001
TI  - In Situ Gas Phase Optical Measurements of Silane Decomposition in a Thermal Chemical Vapor Deposition Reactor
ER  -