TY  - CONF
AU  - R Davis
AU  - Elizabeth Moore
AU  - James Maslar
AU  - Donald Burgess
AU  - D Kremer
AU  - S Ehrman
C2  - Characterization and Metrology for ULSI Technology 2000, International Conference  | | Characterization and Metrology for ULSI Technology |AIP
DA  - 2001-02-01
LA  - en
M1  - 550
PB  - Characterization and Metrology for ULSI Technology 2000, International Conference  | | Characterization and Metrology for ULSI Technology |AIP
PY  - 2001
TI  - A Numerical/Experimental Investigation of Microcontamination in a Rotating Disk Chemical Vapor Deposition Reactor
ER  -