TY  - JOUR
AU  - P Chi
AU  - John Gillen
C2  - Applied Surface Science
DA  - 2004-06-01
LA  - en
M1  - 231
PB  - Applied Surface Science
PY  - 2004
TI  - Positive Secondary Ion Yield Enhancement of Metal Elements Using Trichlorotrifluoroethane and Tetrachloroethene Backfilling
ER  -