TY  - CONF
AU  - Mark Sobolewski
C2  - International Conference on the Characterization and Metrology for ULSI Technology 2000 | | AIP Conference Proceedings #550 Characterization and Metrology for ULSI Technology 2000: International Conference | AIP
DA  - 2001-02-01
LA  - en
M1  - 550
PB  - International Conference on the Characterization and Metrology for ULSI Technology 2000 | | AIP Conference Proceedings #550 Characterization and Metrology for ULSI Technology 2000: International Conference | AIP
PY  - 2001
TI  - Monitoring Ion Current and Ion Energy During Plasma Processing Using Radio-Frequency Current and Voltage Measurements
ER  -