TY  - CONF
AU  - Bryan Barnes
AU  - Francois Goasmat
AU  - Martin Sohn
AU  - Hui Zhou
AU  - Richard Silver
AU  - Andras Vladar
AU  - Abraham Arceo
C2  - Proceedings of the SPIE, San Jose, CA
DA  - 2014-04-02
DO  - https://doi.org/10.1117/12.2048231
LA  - en
M1  - 9050
PB  - Proceedings of the SPIE, San Jose, CA
PY  - 2014
TI  - Optical volumetric inspection of sub-20 nm patterned defects with wafer noise
ER  -