TY  - JOUR
AU  - Mark Sobolewski
AU  - Kristen
C2  - Journal of Vacuum Science and Technology A
DA  - 1999-12-01
LA  - en
M1  - 17
PB  - Journal of Vacuum Science and Technology A
PY  - 1999
TI  - Electrical Control of the Spatial Uniformity of Reactive Species in Plasmas
ER  -