TY  - CONF
AU  - P Chi
AU  - E Handy
AU  - M Rao
C2  - Secondary ion mass spectrometry : SIMS XII : proceedings of the Twelfth International Conference on Secondary Mass Spectrometry (SIMS XII), Brussels, BE
DA  - 1999-09-01
LA  - en
PB  - Secondary ion mass spectrometry : SIMS XII : proceedings of the Twelfth International Conference on Secondary Mass Spectrometry (SIMS XII), Brussels, BE
PY  - 1999
TI  - Effect of AIN Encapsulate in High-Temperature Annealing on Ion-Implanted SiC as Characterized by SIMS
ER  -