TY  - CONF
AU  - Kenneth Kreider
AU  - David Allen
AU  - D Chen
AU  - D DeWitt
AU  - Christopher Meyer
AU  - Benjamin Tsai
C2  - Advanced Thermal Processing of Semiconductors, International Conference | 9th | | IEEE
DA  - 2001-09-01
LA  - en
M1  - 2001
PB  - Advanced Thermal Processing of Semiconductors, International Conference | 9th | | IEEE
PY  - 2001
TI  - Effects of Wafer Emissivity on Light-Pipe Rediometry in RTP Tools
ER  -