TY  - CONF
AU  - John Hurly
AU  - Michael Moldover
C2  - Proceedings of SEMICON West '99, Workshop on Gas Distribution Systems
DA  - 1999-11-01
LA  - en
PB  - Proceedings of SEMICON West '99, Workshop on Gas Distribution Systems
PY  - 1999
TI  - Thermophysical Properties of Process Gases
ER  -