TY  - JOUR
AU  - Kenneth Kreider
AU  - David Allen
AU  - D Chen
AU  - D DeWitt
AU  - Christopher Meyer
AU  - Benjamin Tsai
C2  - International Conference on the Electro Chemical Society
DA  - 2002-05-01
LA  - en
M1  - 1
PB  - International Conference on the Electro Chemical Society
PY  - 2002
TI  - Wafer Emissivity Effects on Light Pipe Radiometry in RTP Tools
ER  -