TY  - CONF
AU  - John Hurly
C2  - International Conference on Characterization and Metrology for ULSI Technology
DA  - 1998-11-01
LA  - en
PB  - International Conference on Characterization and Metrology for ULSI Technology
PY  - 1998
TI  - Properties of Process Gases Determined Accurately With Acoustic Techniques
ER  -