TY  - JOUR
AU  - Kristen, 
AU  - Sobolewski, Mark
C2  - Journal of Vacuum Science and Technology A
DA  - 2003-01-01
LA  - en
M1  - 21
PB  - Journal of Vacuum Science and Technology A
PY  - 2003
TI  - Effect of Changing the Electrode Gap on the Spatial and Electrical Properties of O<sub>2</sub>/CF<sub>4</sub> Plasmas
ER  -