TY - JOUR AU - Kristen AU - Mark Sobolewski C2 - Journal of Vacuum Science and Technology A DA - 2003-01-01 LA - en M1 - 21 PB - Journal of Vacuum Science and Technology A PY - 2003 TI - Effect of Changing the Electrode Gap on the Spatial and Electrical Properties of O2/CF4 Plasmas ER -