TY  - GEN
AU  - Jack Stone
AU  - Balasubramanian Muralikrishnan
AU  - Chittaranjan
C2  - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2011-03-01
LA  - en
M1  - 116
PB  - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2011
TI  - Geometric effects when measuring small holes with micro contact probes.
ER  -