TY  - CONF
AU  - Mark Sobolewski
C2  - International Conference on Characterization and Metrology for ULSI Technology | 2003 | Characterization and Metrology for ULSI Technology:  2003 International Conference on characterization and Metrology for ULSI Technology
DA  - 2003-09-01
LA  - en
M1  - 683
PB  - International Conference on Characterization and Metrology for ULSI Technology | 2003 | Characterization and Metrology for ULSI Technology:  2003 International Conference on characterization and Metrology for ULSI Technology
PY  - 2003
TI  - Monitoring Sheath Voltages and Ion Energies in High-Density Plasmas Using Noninvasive Radio-Frequency Current and Voltage Measurements
ER  -