TY  - JOUR
AU  - Gregory Scace
AU  - Joseph Hodges
C2  - Proceedings of Semicon West 2003 Technology Symposium
DA  - 2003-05-01
LA  - en
PB  - Proceedings of Semicon West 2003 Technology Symposium
PY  - 2003
TI  - Calibrating Water Permeation Tubes Using Saturator-Based Primary Trace Humidity Standards
ER  -