TY  - CONF
AU  - Kenneth Kreider
AU  - William Kimes
AU  - Christopher Meyer
AU  - Dean Ripple
AU  - Benjamin Tsai
AU  - D Chen
AU  - D DeWitt
C2  - Eighth International Temperature Symposium | 8th | Temperature Its Measurement and Control in Science and Industry, Volume Seven | AIP
DA  - 2003-10-01
LA  - en
PB  - Eighth International Temperature Symposium | 8th | Temperature Its Measurement and Control in Science and Industry, Volume Seven | AIP
PY  - 2003
TI  - Calibration of Radiation Thermometers in Rapid Thermal Processing Tools Using Si Wafers with Thin Film Thermocouples
ER  -