TY  - JOUR
AU  - Balasubramanian Muralikrishnan
AU  - Jack Stone
AU  - John Stoup
C2  - J. International Societies for Precision Engineering and Nanotechnology
DA  - 2006-01-01
LA  - en
M1  - 30
PB  - J. International Societies for Precision Engineering and Nanotechnology
PY  - 2006
TI  - Fiber Deflection Probe for Small Hole Metrology
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=822250
ER  -