TY - CONF AU - Jay Hendricks AU - M Aquino-Class AU - Michael Zachariah C2 - The 19th Proceedings of the Electrochemical Society DA - 1998-11-01 LA - en M1 - MA 98-2 PB - The 19th Proceedings of the Electrochemical Society PY - 1998 TI - Thin Film Growth of Titanium and Titanium Nitride Via Gas-Phase Reaction of Sodium Vapor With Titanium Tetrachloride ER -