TY  - GEN
AU  - Kenneth Kreider
AU  - D DeWitt
AU  - Benjamin Tsai
AU  - B Lojek
C2  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2001-01-01
LA  - en
PB  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2001
TI  - Workshop on Temperature Measurement of Semiconductor Wafers Using Thermocouples
ER  -