TY  - CONF
AU  - P Chi
AU  - David Simons
AU  - J McKinley
AU  - F Stevie
AU  - C Granger
C2  - Characterization and Metrology for ULSI Technology, International Conference | | Characterizatoin and Metrology for ULSI Technology 2000 | AIP
DA  - 2001-02-01
LA  - en
M1  - 550
PB  - Characterization and Metrology for ULSI Technology, International Conference | | Characterizatoin and Metrology for ULSI Technology 2000 | AIP
PY  - 2001
TI  - High Precision Measurements of Arsenic Implantation Dose in Silicon by Secondary Ion Mass Spectrometry
ER  -