TY  - CONF
AU  - Thomas Germer
C2  - International Conference on Characterization and Metrology for ULSI Technology
DA  - 1998-03-01
LA  - en
PB  - International Conference on Characterization and Metrology for ULSI Technology
PY  - 1998
TI  - Polarized Light Scattering and its Application to Microroughness, Particle, and Defect Detection
ER  -