TY  - JOUR
AU  - Thomas Germer
AU  - Li Sung
C2  - Conference on Electromagnetic and Light Scattering by Nonspherical Particles: Theory and Application
DA  - 1999-07-01
LA  - en
M1  - 4
PB  - Conference on Electromagnetic and Light Scattering by Nonspherical Particles: Theory and Application
PY  - 1999
TI  - Polarized Light Scattering Measurements of Roughness, Subsurface Defects, Particles, and Dielectric Layers on Silcon Wafers
ER  -