TY - ICOMM AU - Russell, C AU - Owens, S AU - Deslattes, R AU - Diebold, A C1 - internal:/None C2 - Electronic Publication DA - 2001-01-01 LA - en M1 - 550 PB - Electronic Publication PY - 2001 TI - An Examination of Tantalum Pentoxide Thin Dielectric Films Using Grazing Incidence X-Ray Reflectivity and Powder Diffraction ER -