TY  - CONF
AU  - Charles Tarrio
AU  - Robert Vest
AU  - S Grantham
C2  - Harnessing Light: Optical Science and Metrology at NIST
DA  - 2001-08-01
LA  - en
M1  - 4450
PB  - Harnessing Light: Optical Science and Metrology at NIST
PY  - 2001
TI  - Absolute Extreme Ultraviolet Metrology
ER  -