TY  - GEN
AU  - Charles Tarrio
AU  - S Grantham
AU  - M Squires
AU  - Robert Vest
AU  - Thomas Lucatorto
C2  - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2003-07-01
LA  - en
M1  - 108 No. 4
PB  - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2003
TI  - Towards High Accuracy Reflectometry for Extreme-Ultraviolet Lithography
ER  -