TY - JOUR AU - A. Mahan AU - Y Xu AU - B Nelson AU - R Crandall AU - J Cohen AU - K Palinginis AU - Alan Gallagher C2 - Applied Physics Letters DA - 2001-06-01 LA - en M1 - 78 PB - Applied Physics Letters PY - 2001 TI - Saturated Defect Densities of Hydrogenated Amorphous Silicon Grown by Hot-Wire Chemical Vapor Deposition at Rates up to 150 /S ER -