TY - JOUR
AU - Eric Benck
AU - A Goyette
AU - Yicheng Wang
C2 - Journal of Applied Physics
DA - 2003-08-01
LA - en
M1 - 94
PB - Journal of Applied Physics
PY - 2003
TI - Ion Energy Distribution and Optical Measurements in High-Density, Inductively Coupled C4F6 Discharges
ER -