TY  - CONF
AU  - B Yan
AU  - J Yang
AU  - S Guha
AU  - Alan Gallagher
C2  - Amorphous and Heterogeneous Silicon Thin Films-Fundamentals to Devices, Symposium A | | Amorphous and Heterogeneous Silicon Thin Films--1999 | Materials Research Society
DA  - 2000-06-01
LA  - en
M1  - 557
PB  - Amorphous and Heterogeneous Silicon Thin Films-Fundamentals to Devices, Symposium A | | Amorphous and Heterogeneous Silicon Thin Films--1999 | Materials Research Society
PY  - 2000
TI  - Analysis of Plasma Properties and Deposition of Amorphous Silicon Alloy Solar Cells Using Very High Frequency Glow Discharge
ER  -