TY - CONF AU - Thomas Germer AU - Michael Fasolka C2 - Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies | SPIE DA - 2003-11-01 LA - en M1 - 5188 PB - Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies | SPIE PY - 2003 TI - Characterizing Surface Roughness of Thin Films by Polarized Light Scattering ER -