TY - JOUR AU - Gallagher, Alan C2 - Physical Review E (Statistical, Nonlinear, and Soft Matter Physics) DA - 2000-08-01 LA - en M1 - 62 PB - Physical Review E (Statistical, Nonlinear, and Soft Matter Physics) PY - 2000 TI - Model of Particle Growth in Silane Discharges ER -