TY  - JOUR
AU  - Alan Gallagher
AU  - A Howling
AU  - C Hollenstein
C2  - Journal of Applied Physics
DA  - 2002-05-01
LA  - en
M1  - 91
PB  - Journal of Applied Physics
PY  - 2002
TI  - Anion Reactions in Silane Plasmas
ER  -