TY  - JOUR
AU  - John Burnett
AU  - Zachary Levine
AU  - Eric Shirley
C2  - Semiconductors
DA  - 2001-12-01
LA  - en
M1  - 15
PB  - Semiconductors
PY  - 2001
TI  - Intrinsic Birefringence in Crystalline Optical Materials for 193 nm and 157 nm Lithography
ER  -