TY  - CONF
AU  - Thomas Germer
C2  - Characterization and Metrology for ULSI Technology 2000, International Conference  | | Characterization and Metrology for ULSI Technology |AIP
DA  - 2001-06-01
LA  - en
M1  - 550
PB  - Characterization and Metrology for ULSI Technology 2000, International Conference  | | Characterization and Metrology for ULSI Technology |AIP
PY  - 2001
TI  - Characterizing Interfacial Roughness by Light Scattering Ellipsometry
ER  -