TY  - JOUR
AU  - Thomas Germer
C2  - SPIE series
DA  - 1998-04-01
LA  - en
M1  - 3275
PB  - SPIE series
PY  - 1998
TI  - Application of Bidirectional Ellipsometry to the Characterization of Roughness and Defects in Dielectric Layers
ER  -