TY  - JOUR
AU  - Eric Benck
AU  - J Roberts
C2  - Characterization and Metrology for ULSI Technology Conference
DA  - 1998-07-01
LA  - en
PB  - Characterization and Metrology for ULSI Technology Conference
PY  - 1998
TI  - Optical Computer Aided Tomography Measurements of Plasma Uniformity in an Inductively Coupled Discharge
ER  -