TY  - JOUR
AU  - John Burnett
AU  - R Gupta
C2  - Future Fab International
DA  - 2000-07-01
LA  - en
M1  - 8
PB  - Future Fab International
PY  - 2000
TI  - Optical Materials and Detector Characterization for 193 nm and 157 nm Lithography
ER  -