TY  - JOUR
AU  - John Gillaspy
AU  - D Parks
AU  - L Ratliff
C2  - Journal of Vacuum Science and Technology B
DA  - 1998-09-01
LA  - en
M1  - 16
PB  - Journal of Vacuum Science and Technology B
PY  - 1998
TI  - Masked Ion Beam Lithography with Highly Charged Ions
ER  -