TY  - JOUR
AU  - K Rozsa
AU  - G Bano
AU  - Alan Gallagher
C2  - IEEE Transactions on Plasma Science
DA  - 2001-04-01
LA  - en
M1  - 29
PB  - IEEE Transactions on Plasma Science
PY  - 2001
TI  - The Location of Very Small Particles in Silane RF Discharge
ER  -