TY - GEN AU - Christopher Soles AU - V. Lee AU - Eric Lin AU - Wen-Li Wu C2 - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD DA - 2004-06-01 LA - en M1 - 33(1) PB - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD PY - 2004 TI - Pore Characterization in Low-k Dielectric Films Using X-Ray Reflectivity: X-Ray Porosimetry UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852383 ER -