TY  - JOUR
AU  - Wen-Li Wu
AU  - Eric Lin
AU  - Christopher Soles
C2  - Future Fab International
DA  - 2004-06-21
LA  - en
M1  - 17
PB  - Future Fab International
PY  - 2004
TI  - Structure Characterization of Porous Interlevel Dielectric Films
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852387
ER  -