TY  - JOUR
AU  - R Hedden
AU  - C Waldfried
AU  - H Lee
AU  - O Escorcia
C2  - Journal of the Electrochemical Society
DA  - 2004-01-01
LA  - en
M1  - 151(8)
PB  - Journal of the Electrochemical Society
PY  - 2004
TI  - Comparison of Curing Processes for Porous Dielectrics Measurements From Specular X-ray Reflectivity
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852140
ER  -