TY  - CONF
AU  - Chad Snyder
C2  - Proceedings of the 2000 International Conference on Characterization and Metrology for ULSI Technology,  Gaithersburg, MD
DA  - 2001-01-01
LA  - en
M1  - 550
PB  - Proceedings of the 2000 International Conference on Characterization and Metrology for ULSI Technology,  Gaithersburg, MD
PY  - 2001
TI  - High Sensitivity Technique for Measurement of Thin Film Out-of-Plane Expansion. II. Conducting and Semiconducting Samples
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851726
ER  -