TY  - CONF
AU  - Eric Lin
AU  - Sushil Satija
AU  - Wen-Li Wu
AU  - Christopher Soles
AU  - D Goldfarb
AU  - B Trinque
AU  - S Burns
AU  - Ronald Jones
AU  - Joseph~undefined~undefined~undefined~undefined~undefined Lenhart
AU  - M Angelopoulos
AU  - C Willson
C2  - Advances in Resist Processing and Technology, Conference | 19th | Advances in Resist Processing and Technology XIX | SPIE, CA, CA
DA  - 2002-12-01
LA  - en
M1  - 4690
PB  - Advances in Resist Processing and Technology, Conference | 19th | Advances in Resist Processing and Technology XIX | SPIE, CA, CA
PY  - 2002
TI  - Measurement of the Spatial Evolution of the Deprotection Reaction Front With Nanometer Resolution Using Neutron Reflectometry
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852040
ER  -