TY  - CONF
AU  - Lin, Eric
AU  - Wu, Wen-Li
AU  - Jin, C
AU  - Wetzel, J
C2  - | | AIP Conference Proceedings #550 Characterization and Metrology for ULSI Technology 2000: International Conference | AIP,  San Francisco, CA
DA  - 2001-02-01
LA  - en
M1  - 550
PB  - | | AIP Conference Proceedings #550 Characterization and Metrology for ULSI Technology 2000: International Conference | AIP,  San Francisco, CA
PY  - 2001
TI  - Structure and Property Characterization of Porous Low-k Dielectric Constant Thin Films Using X-ray Reflectivity and Small Angle Neutron Scattering
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851750
ER  -