TY  - JOUR
AU  - E Jablonski
AU  - S Sambasivan
AU  - Eric Lin
AU  - Daniel Fischer
AU  - C Devadoss
AU  - R Puligadda
C2  - Journal of Vacuum Science and Technology B
DA  - 2003-01-01
LA  - en
M1  -  21(6)
PB  - Journal of Vacuum Science and Technology B
PY  - 2003
TI  - Near Edge X-Ray Absorption Fine Structure Measurements of the Interface between Bottom Antireflective Coatings and a Model Deprotected Photoresist
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853911
ER  -