TY  - CONF
AU  - T Hu
AU  - Ronald Jones
AU  - Wen-Li Wu
AU  - Christopher Soles
AU  - Eric Lin
AU  - M Arpan
AU  - D Casa
C2  - American Chemical Society, Division of Polymer Chemistry, National Meeting | 26th | 26th ACS National Meeting | American Chemical Society
DA  - 2003-09-01
LA  - en
M1  - 44
PB  - American Chemical Society, Division of Polymer Chemistry, National Meeting | 26th | 26th ACS National Meeting | American Chemical Society
PY  - 2003
TI  - Fast Evaluation of Next-Generation Lithographical Patterns by Small Angle X-Ray Scattering
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852191
ER  -