TY  - CONF
AU  - Joseph Kopanski
AU  - Lin You
AU  - Jungjoon Ahn
AU  - Emily Hitz
AU  - Yaw Obeng
C2  - Electrochemical Society Transactions,Proceedings of the Symposium on Dielectrics for Nanosystems 6:  Materials Science, Processing, Reliability, and Manufacturing, Orlando, FL
DA  - 2014-05-11
DO  - https://doi.org/10.1149/06102.0185ecst
LA  - en
M1  - 61
PB  - Electrochemical Society Transactions,Proceedings of the Symposium on Dielectrics for Nanosystems 6:  Materials Science, Processing, Reliability, and Manufacturing, Orlando, FL
PY  - 2014
TI  - Scanning Probe Microscopes for Subsurface Imaging
ER  -